JPS6329742Y2 - - Google Patents

Info

Publication number
JPS6329742Y2
JPS6329742Y2 JP1984135241U JP13524184U JPS6329742Y2 JP S6329742 Y2 JPS6329742 Y2 JP S6329742Y2 JP 1984135241 U JP1984135241 U JP 1984135241U JP 13524184 U JP13524184 U JP 13524184U JP S6329742 Y2 JPS6329742 Y2 JP S6329742Y2
Authority
JP
Japan
Prior art keywords
graphite
heating element
piece
temperature
graphite heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984135241U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6150775U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984135241U priority Critical patent/JPS6329742Y2/ja
Publication of JPS6150775U publication Critical patent/JPS6150775U/ja
Application granted granted Critical
Publication of JPS6329742Y2 publication Critical patent/JPS6329742Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1984135241U 1984-09-07 1984-09-07 Expired JPS6329742Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984135241U JPS6329742Y2 (en]) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984135241U JPS6329742Y2 (en]) 1984-09-07 1984-09-07

Publications (2)

Publication Number Publication Date
JPS6150775U JPS6150775U (en]) 1986-04-05
JPS6329742Y2 true JPS6329742Y2 (en]) 1988-08-09

Family

ID=30693740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984135241U Expired JPS6329742Y2 (en]) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPS6329742Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4567192B2 (ja) * 1998-06-26 2010-10-20 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド 結晶成長装置用電気抵抗ヒータ及びその使用方法
JP2014062004A (ja) * 2012-09-20 2014-04-10 Ibiden Co Ltd 黒鉛ヒーター

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5167536A (ja) * 1974-12-09 1976-06-11 Japan Radio Co Ltd Itajohiitaa

Also Published As

Publication number Publication date
JPS6150775U (en]) 1986-04-05

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